Initial energy distributions of secondary ions in electronics sputtering

dc.contributor.author	Abeywarna, U.K.
dc.date.accessioned	2011-12-07T07:40:06Z
dc.date.available	2011-12-07T07:40:06Z
dc.date.issued	1999
dc.identifier.citation	Ph. D. Thesis	en_US
dc.identifier.uri	http://archive.cmb.ac.lk:8080/xmlui/handle/70130/962
dc.language.iso	en	en_US
dc.title	Initial energy distributions of secondary ions in electronics sputtering	en_US
dc.type	Thesis	en_US